歪みセンサへの応用を目指した金属ナノクラスタを分散した非晶質炭素膜
Nano-cluster dispersed amorphous carbon film for strain sensor applications
著者:
竹野 貴法 Takanori TAKENO 菅原 敏文 Toshifumi SUGAWARA 三木 寛之 Hiroyuki MIKI
発刊日:
公開日:
Diamond-like CarbonStrain SensorTungsten metal
概要
In this study, a novel strain sensor using metal-containing diamond-like carbon films is proposed. A film of several hundred nanometer in thickness was deposited onto silicon wafer. The strain sensitivi ty was measured by the 4-point bending test. The temperature coefficient of resistance was also calculated from the resuslts of temperature dependence of the resistance. The obtained results show that t he variation of normalized resistance has the relation against the applied strain and gauge factor was calculated as 6.1. However, the temperature coefficient of the resistance was ~2170 ppm/°C. However , relatively high temperature coefficient of resistance can be improved by increasing metal concentration. Thus, the proposed sensor is expected to be used as a newly developed thin film strain sensor.
