Borosilicate glass was coated with Al2O3 and SiC by the radio frequency (RF) magnetron-sputtering method under various conditions. The mechanical properties of coated materials were investigated with respect to the sputtering conditions. The roughness, por osity and resistivity of surfaces of coated materials were measured, and the surface characteristics were clarified. The hardness of material coated with Al2O3 and SiC layer was measured by using a dynamic hardness tester. The hardness hardly depended on...
英字タイトル:
Mechanical Properties of Borosilicate Glass Coated with Two-Layered Ceramics by Sputtering