---

概要

Borosilicate glass was coated with Al2O3 and SiC by the radio frequency (RF) magnetron-sputtering method under various conditions. The mechanical properties of coated materials were investigated with respect to the sputtering conditions. The roughness, por osity and resistivity of surfaces of coated materials were measured, and the surface characteristics were clarified. The hardness of material coated with Al2O3 and SiC layer was measured by using a dynamic hardness tester. The hardness hardly depended on th e RF output power, though the hardness of materials coated under every condition was inferior to that of the substrate glass. Strength tests of coated materials and the substrate glass were also conducted under three-point bending mode. The bending strengt h of the coated material decreased when sputtering during longer period. However, it was better than that of substrate glass. Some good correlation between bending strength and hardness was observed for specimens that were broken into more than three parts.

---

全文掲載のPDFファイルダウンロード

• PDFファイルダウンロード