マイクロX 線CT によるセラミックスの欠陥検査
Study of inspection for ceramics materials using X-CT
著者:
西村 良弘 Yoshihiro NISHIMURA 笹本 明 SASAMOTO Akira 鈴木 隆之 Takayuki SUZUKI 北 英紀 Hideki KITA 平尾 喜代司 Kiyoshi HIRAO
発刊日:
公開日:
AluminaSAMSilicon nitrideX-ray CT
概要
Recently, ceramics materials have become used in many industrial fields because of their thermally stability and stiffness. But they have not been employed to manufacture structure parts larger than one meter. The fracture pattern of ceramics materials is usually more instantaneous than that of ordinary materials, such as steel. Conventionally, inspections for improving the qualities of ceramics parts were often do ne with sampled products, not all products, by optical microscope and/or SEM. In this study, SEM and SAM were applied to two grades of silicon nitride ceramics which were purified and the distribution differenc es of defects on sample surfaces and those under surfaces were shown. X-ray CT was applied to alumina ceramics including fishing string inside and the CT images before annealing and after annealing were shown.
