高温磁気センサの開発
Development of High Temperature Magnetic Sensor
著者:
髙屋 茂 Shigeru TAKAYA 荒川 尚 Hisashi ARAKAWA 欅田 理 Satoshi KEYAKIDA
発刊日:
公開日:
Differential PermeabilityFlux Gate SensorHeat ResistanceOxidationPermendur
概要
A magnetic sensor which can be applied to measurement at elevated temperature was newly developed. It is a kind of flux gate magnetic sensor. Permendur was employed for a magnetic core instead of Permalloy which is commonly used because Permendur has much higher Curie point, about 1000oC. Heat resistant ceramic coating Cu wires were used for coils. External magnetic field is detected by shift of peak position of differential permeability during induction of triangular excitation current. A magnetic core has race track shape with a fine part to make peak position more clear and increase detectability. The output of the developed sensor showed good linearity with external magnetic field even at 500oC. Furthermore, the durability of the sensor was discussed, and it was shown that decrease in coil performance after some operation at elevated temperature seems to be a critical issue.