磁気センサの分解能を考慮した逆解析に基づく欠陥形状の評価


英字タイトル:
Evaluation of Defect Shape Based on Inverse Analysis Considering the Resolution of Magnetic Sensor
著者:
中住 昭吾 Shogo NAKASUMI 鈴木 隆之 Takayuki SUZUKI
発刊日:
公開日:
カテゴリ: 論文
キーワードタグ:

概要

In this paper, an improvement technique for non-destructive evaluation using magnetic flux leakage is presented. It is indicated that the magnetic flux density varies steeply around defects. The response function which associates magnetic dipole and magnetic flux density in terms of geometrical coordinate is improved in order to catch the average value of magnetic flux along sensor length instead of locally-restricted value. The effect of that improvement is verified in the scheme of numerical simulation. Inverse analysis of semielliptical surface defect is conducted. Tikhonov regularization technique is used to obtain well-suited magnetic configuration image. The restored defect shape becomes more proper by improved response function. Especially in low liftoff case, remarkable improvement is indicated.


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